1. Cleanroom equipment
Fume hoods
Fume hoods
- Tủ hút hoá chất
- Tủ hút axit
Wet benches
Wet process benches
- Wet bench axit
- Wet bench dung môi
Glassware
Borosilicate 3.3 – heat & chemical resistant
- Beaker 250 mL
- Beaker 500 mL
- Beaker 1000 mL
- Erlenmeyer 250 mL
- Erlenmeyer 500 mL
- Volumetric flask 100 mL
- Round-bottom flask 250 mL
- Graduated cylinder 100 mL
Gloves + Bunny suits
- Cleanroom nitrile gloves
- Bunny suit (coverall)
- Cleanroom face mask
- Cleanroom wipes
2. Semiconductor process equipment
Spin coater
- Spin coater
Mask aligner
- Mask aligner
Direct laser writer
- Direct laser writer
CVD systems
- CVD system
RIE systems
- RIE systems
Sputtering systems
- Sputtering systems
3. Metrology & characterization
Optical microscope
- Optical microscope
Profilometer
- Profilometer
4. Laboratory equipment
Vacuum systems
- Vacuum systems
Gas delivery systems
- Gas delivery systems
Process monitoring equipment
- Process monitoring equipment
Heating & synthesis equipment
- Magnetic hotplate stirrer
- Muffle furnace 1400 °C
- Hydrothermal autoclave 100 mL